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Studies on slurry design fundamentals for advanced CMP applications
(ECS, 2013)
New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ...
Surfactant mediated slurry formulations for Ge CMP applications
(Cambridge University Press, 2013)
In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ...
Improving selectivity on germanium CMP applications
(ECS, 2014)
In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical ...
Calibration of 2D ultrasound in 3D space for robotic biopsies
(IEEE, 2015)
Freehand Ultrasound technique is widely used in intraoperative biopsy procedures for detecting the volumes of interest. Freehand ultrasound probe is faster and flexible with 6 degrees of freedom. Thats why the imaging ...
Metal oxide nano film characterization for CMP optimization
(ECS, 2013)
This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ...
A computational and experimental investigation of synthetic jets for cooling of electronics
(The American Society of Mechanical Engineers, 2015-06-01)
Seamless advancements in electronics industry resulted in high performance computing. These innovations lead to smaller electronics systems with higher heat fluxes than ever. However, shrinking nature of real estate for ...
Silver patterning using an atomic force microscope tip and laser-induced chemical deposition from liquids
(AIP Publishing, 2012)
This article presents a new direct patterning technique in which laser photoreduction of silver from a liquid is controlled by a scanning atomic force microscope tip. Contrary to expectations, the tip suppresses, rather ...
Numerical and experimental analysis of the flow and transition of free synthetic jets
(IOP Publishing, 2019-04)
In this paper, flow characteristics and the transition of synthetic jets are investigated numerically and experimentally. The investigated synthetic jets have a dimensionsless stroke length L-0/d of 146 and 167, an U-0 of ...
Photocatalytic and antibacterial functionality evaluation of nanoboron coated textiles
(2016-09-01)
Antibacterial properties of boron-containing compounds are well known although studies available on pure boron nanoparticles are relatively limited. In the present study, we examine the feasibility of the application of ...
Dependent absorption and scattering by interacting nanoparticles
(Begell House Inc., 2010)
Dependent light scattering and absorption patterns of metallic nano-sized particles in interaction with other spherical and cone-like structures were investigated. The numerical solution of the light scattering problem was ...
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