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Numerical and experimental analysis of impinging synthetic jets for cooling a point-like heat source
(ASME, 2018-05-01)
High power light emitting diodes (LEDs) being used for low and high beam in automotive lighting need active cooling of their heat sinks by radial or axial fans. But the moving elements of the fan cause abrasion, noise, and ...
Understanding selectivity on Germanium/SiO2 chemical mechanical planarization through design of experiments
(Cambridge University Press, 2015)
The continuous trend of achieving more complex microelectronics with smaller nodes yet larger wafer sizes in microelectronics manufacturing lead to aggressive development requirements for chemical mechanical planarization ...
Studies on slurry design fundamentals for advanced CMP applications
(ECS, 2013)
New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ...
Metal CMP optimization based on chemically formed thin film analysis
(The Electrochemical Society, 2009)
The conventional demands for development in semiconductor industry are changing as the Moore's Law is approaching to its limits. This paper demonstrates a theoretical optimization approach for the planarization of metal ...
Surfactant mediated slurry formulations for Ge CMP applications
(Cambridge University Press, 2013)
In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ...
Improving selectivity on germanium CMP applications
(ECS, 2014)
In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical ...
Calibration of 2D ultrasound in 3D space for robotic biopsies
(IEEE, 2015)
Freehand Ultrasound technique is widely used in intraoperative biopsy procedures for detecting the volumes of interest. Freehand ultrasound probe is faster and flexible with 6 degrees of freedom. Thats why the imaging ...
Metal oxide nano film characterization for CMP optimization
(ECS, 2013)
This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ...
A computational and experimental investigation of synthetic jets for cooling of electronics
(The American Society of Mechanical Engineers, 2015-06-01)
Seamless advancements in electronics industry resulted in high performance computing. These innovations lead to smaller electronics systems with higher heat fluxes than ever. However, shrinking nature of real estate for ...
Silver patterning using an atomic force microscope tip and laser-induced chemical deposition from liquids
(AIP Publishing, 2012)
This article presents a new direct patterning technique in which laser photoreduction of silver from a liquid is controlled by a scanning atomic force microscope tip. Contrary to expectations, the tip suppresses, rather ...
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