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Vertical cavity capacitive transducer
(American Institute of Physics Inc., 2021-04-01)
The capacitive micromachined ultrasonic transducer (CMUT) has inherent advantages, such as larger bandwidth and monolithic integration capability with electronics, when compared to the piezoelectric transducer. The most ...
Noise analysis of mode matched vibratory gyroscopes
(Springer, 2023-01)
MEMS (micro-electromechanical system) vibratory gyroscopes have attracted a lot of interest recently and these gyroscopes made their way through portable devices and smart phones. However, their performance is not enough ...
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