Design and fabrication of high-frequency ultra-wideband 1D CMUT arrays for acoustic angiography applications - preliminary results
Type :
Conference paper
Publication Status :
Published
Access :
restrictedAccess
Abstract
For superharmonic imaging applications involving the use of microbubble contrast agents, transducers that can transmit energy at low frequencies (less than 5 MHz) to excite the microbubbles, and at the same time detect scattered echoes at higher harmonics (greater than 20 MHz) are essential. We explored the advantages of a thin silicon plate with an added central mass combined with a reduced bottom electrode area to further improve the bandwidth of 1D capacitive micromachined ultrasonic transducer arrays. FEM simulation results show that the fabricated devices can transmit at low frequency (<;3 MHz) and receive echoes at high frequency (beyond 30 MHz). This translates into a 180% fractional bandwidth at 17 MHz for the fabricated 1D CMUT array.
Source :
2018 IEEE International Ultrasonics Symposium (IUS)
Date :
2018-12-20
Volume :
2018
Publisher :
IEEE
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