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Benchmark study of 2D and 3D VOF simulations of a simplex nozzle using a hybrid RANS-LES approach
(Elsevier, 2022-07-01)
In this study, a simplex nozzle is tested with water for the benchmarking of different flow simulation models. A large scale Plexi-glass transparent nozzle is used to reduce the influence of production tolerances on the ...
Model-based optimization of CMP process parameters for uniform material removal selectivity in cu/barrier planarization
(IOP Publishing, 2022-02-01)
Chemical mechanical planarization is a process of achieving planar surfaces in the semiconductor manufacturing industry. The planarization of a surface is achieved by material removal from the wafer surface. The material ...
3D simulation of droplet impact on static and moving walls
(Begell House Inc., 2022)
In the present study, the contact angle model and the origin of the parasitic current, precisely, the relation of the parasitic current with grid distribution, have been studied to accurately predict droplet impact on ...
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