Browsing Mechanical Engineering by Author "Hii, K.-F."
Now showing items 1-1 of 1
-
Design, operation, and motion characteristics of a precise piezoelectric linear motor
Hii, K.-F.; Vallance, R. R.; Mengüç, Mustafa Pınar (Elsevier, 2010-04)This paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications ...
Share this page