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Gallium nitride chemical mechanical planarization development through tool set-up, process and post CMP cleaning optimization
(2018-07)
In this thesis, a new Chemical Mechanical Planarization (CMP) process and a complementary tool set-up are introduced to enhance Gallium Nitride (GaN) material removal rates while controlling the post planarization surface ...
Experimental investigation of droplet impact on moving surfaces
(2018-01)
Droplet impact on moving surfaces has been studied experimentally by using high-speed photography technique. Fluid properties (droplet diameter and velocity), surface properties (wettability and roughness) and surface ...
Electrochemical evaluations of TiO2 nano films for advanced engineering applications
(2018-05)
This study evaluates the performance TiO2 nano-film for engineering applications, both in biomedicine and microelectronics, were Chemical Mechanical Planarization (CMP) is a main process used for planarizing the metal ...
High temperature mechanical characteristics of friction stir processed light alloys
(2018-08)
Friction stir processing (FSP) is a recently developed process for surface modification of light alloys that has expanded into applications other than microstructure refinement by the concept of fabricating metal matrix ...
A comparative study on the severe plastic deformation of metals by constrained groove pressing
(2018-06)
The main purpose of the present thesis is to reveal the microstructural refinement and mechanical behavior improvement of metallic materials, some of which are difficult to work, through severe plastic deformation. Constrained ...
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