Publication: Cantilever array oscillators with nonlinear optical readout
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Journal ISSN
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Type
Conference paper
Access
info:eu-repo/semantics/restrictedAccess
Publication Status
published
Abstract
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
Date
2015
Publisher
IEEE
Description
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