Publication: Cantilever array oscillators with nonlinear optical readout
Institution Authors
YARALIOĞLU, Göksen Göksenin
Authors
Lüleç, S. Z.
Adiyan, U.
Yaralıoğlu, Göksen Göksenin
Leblebici, Y.
Urey, H.
Journal Title
Journal ISSN
Volume Title
Type
Conference paper
Access
info:eu-repo/semantics/restrictedAccess
Publication Status
published
Abstract
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
Date
2015
Publisher
IEEE
Description
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