Browsing by Subject "Agglomeration"
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Effect of slurry aging on stability and performance of chemical mechanical planarization process
(Elsevier, 2011-03)Chemical mechanical planarization (CMP) is known to be one of the most challenging processes in microelectronics manufacturing due to the number of variables involved in the design of the process. In particular, the slurries ... -
A review of optical and radiative properties of nanoparticle suspensions: effects of particle stability, agglomeration, and sedimentation
(Begell House Inc., 2020)Nanoparticle suspensions (NPSs) are suspensions of nanosize particles in base fluids in the form of a solid-liquid mixture. They are used extensively in a wide range of industrial and engineering applications, and show ...
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