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Nano-boron as an antibacterial agent for functionalized textiles
(Cambridge University Press, 2015-01)
The antibacterial properties of boron-containing compounds are well known although there are limited studies available on the pure boron nanoparticles. In this study boron nano-particles were characterized in terms of their ...
3-D extension of chemical mechanical polishing for nano-structuring applications on alternative technologies
(The Electrochemical Society, 2016)
In this study we tune the chemical mechanical polishing process to a 3-D level to generate controlled nanostructures on functional metallic surfaces such as titanium implants and steel based heating elements. The chemical ...
A model of chemical mechanical planarization to predict impact of pad conditioning on process performance
(Cambridge University Press, 2012)
This study presents an effort to couple a wafer removal rate profile model based on the locally relevant Preston equation to the change in pad thickness profile which reflects to post polish profile of the wafers after ...
Characterization and antibacterial properties of nanoboron powders and nanoboron powder coated textiles
(Elsevier, 2017-02)
The antibacterial properties of boron-containing compounds are well known although there are limited studies available on the pure boron nanoparticles. In this paper, nanoboron particles are characterized in terms of their ...
Optimized process and tool design for gan chemical mechanical planarization
(The Electrochemical Society, 2017-10-04)
In this paper, we present a systematic approach to the gallium nitride (GaN) chemical mechanical planarization (CMP) process through evaluating the effect of crystallographic orientation, slurry chemistry and process ...
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