Browsing Mechanical Engineering by Author "Yagan, Rawana"
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A fundamental approach to electrochemical analyses on chemically modified thin films for barrier CMP optimization
Yagan, Rawana; Başım, Gül Bahar (IOP Publishing, 2019-04-09)Chemical Mechanical Planarization (CMP) process development for 10nm nodes and beyond demands a systematic understanding of atomic-scale chemical and mechanical surface interactions for the control of material removal, ...
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