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Studies on slurry design fundamentals for advanced CMP applications
(ECS, 2013)
New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ...
Metal CMP optimization based on chemically formed thin film analysis
(The Electrochemical Society, 2009)
The conventional demands for development in semiconductor industry are changing as the Moore's Law is approaching to its limits. This paper demonstrates a theoretical optimization approach for the planarization of metal ...
Surfactant mediated slurry formulations for Ge CMP applications
(Cambridge University Press, 2013)
In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ...
Hybrid job scheduling for improved cluster utilization
(Springer Science+Business Media, 2014)
In this paper, we investigate the models and issues as well as performance benefits of hybrid job scheduling over shared physical clusters. Clustering technologies that are currently supported include MPI, Hadoop-MapReduce ...
Improving selectivity on germanium CMP applications
(ECS, 2014)
In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical ...
Search for a standard model Higgs boson produced in association with a top-quark pair and decaying to bottom quarks using a matrix element method
(Springer Nature, 2015-06)
A search for a standard model Higgs boson produced in association with a top-quark pair and decaying to bottom quarks is presented. Events with hadronic jets and one or two oppositely charged leptons are selected from a ...
Calibration of 2D ultrasound in 3D space for robotic biopsies
(IEEE, 2015)
Freehand Ultrasound technique is widely used in intraoperative biopsy procedures for detecting the volumes of interest. Freehand ultrasound probe is faster and flexible with 6 degrees of freedom. Thats why the imaging ...
Metal oxide nano film characterization for CMP optimization
(ECS, 2013)
This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ...
Interpretability of deep learning models: a survey of results
(IEEE, 2018-06-26)
Deep neural networks have achieved near-human accuracy levels in various types of classification and prediction tasks including images, text, speech, and video data. However, the networks continue to be treated mostly as ...
A computational and experimental investigation of synthetic jets for cooling of electronics
(The American Society of Mechanical Engineers, 2015-06-01)
Seamless advancements in electronics industry resulted in high performance computing. These innovations lead to smaller electronics systems with higher heat fluxes than ever. However, shrinking nature of real estate for ...
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