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A modeling study on the layout impact of with-in-die thickness range for STI CMP
(ECS, 2013)
Chemical Mechanical Planarization process has a proven track record as an effective method for planarizing the wafer surface at multiple points of the semiconductor manufacturing flow. One of the most challenging aspects ...
Analysis of near-field radiation transfer within nano-gaps using FDTD method
(Elsevier, 2014-10)
Enhancement of near-field radiative emission via coupling of surface plasmons in nano-gaps formed between thin films is important for understanding and implementation of energy harvesting using nano-thermophotovoltaic ...
Effect of commercial purity levels on the mechanical properties of ultrafine-grained titanium
(Elsevier, 2011-03-15)
Two grades of commercial purity (CP) titanium (grades 2 and 4) were processed using equal-channel angular extrusion (ECAE) at 300 ◦C and 450 ◦C, respectively. The processing temperatures were the minimum temperatures at ...
High-throughput computational screening of the metal organic framework database for CH4/H-2 separations
(American Chemical Society, 2018-01)
Metal organic frameworks (MOFs) have been considered as one of the most exciting porous materials discovered in the last decade. Large surface areas, high pore volumes, and tailorable pore sizes make MOFs highly promising ...
Tailoring silica nanotribology for CMP slurry optimization: Ca2+ cation competition in C12TAB mediated lubrication
(ACS, 2010-04-12)
Self-assembled surfactant structures at the solid/liquid interface have been shown to act as nanoparticulate dispersants and are capable of providing a highly effective, self-healing boundary lubrication layer in aqueous ...
Impact of pad conditioning on thickness profile control in chemical mechanical planarization
(Springer Science+Business Media, 2013-01)
Chemical mechanical planarization (CMP) has been proven to be the best method to achieve within-wafer and within-die uniformity for multilevel metallization. Decreasing device dimensions and increasing wafer sizes continuously ...
High temperature deformation behavior of 4340 steel: activation energy calculation and modeling of flow
(Elsevier, 2013-12)
The 4340 steel is extensively utilized in several industries including automotive and aerospace for manufacturing a large number of structural components. Due to the importance of thermo-mechanical processing in the ...
Polarization imaging of multiply-scattered radiation based on integral-vector Monte Carlo method
(Elsevier, 2010-01)
A new integral-vector Monte Carlo method (IVMCM) is developed to analyze the transfer of polarized radiation in 3D multiple scattering particle-laden media. The method is based on a “successive order of scattering series” ...
Self-discovery of motor primitives and learning grasp affordances
(IEEE, 2012)
Human infants practice their initial, seemingly random arm movements for transforming them into voluntary reaching and grasping actions. With the developing perceptual abilities, infants further explore their environment ...
Human adaptation to human–robot shared control
(IEEE, 2019-04)
Human-in-the-loop robot control systems naturally provide the means for synergistic human-robot collaboration through control sharing. The expectation in such a system is that the strengths of each partner are combined to ...
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