Browsing Faculty of Engineering by Author "Başım, Gül Bahar"
Now showing items 21-37 of 37
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Metal CMP optimization based on chemically formed thin film analysis
Başım, Gül Bahar (The Electrochemical Society, 2009)The conventional demands for development in semiconductor industry are changing as the Moore's Law is approaching to its limits. This paper demonstrates a theoretical optimization approach for the planarization of metal ... -
Metal oxide nano film characterization for CMP optimization
Başım, Gül Bahar; Karagöz, Ayşe; Özdemir, Zeynep (ECS, 2013)This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ... -
Metal oxide thin film characterization for new generation chemical mechanical planarization development
Başım, Gül Bahar; Karagoz, Ayşe (The Electrochemical Society, 2016)This study targets to create a basis for the process development in the new generation semiconductor industry dealing with atomic scale devices. We focus on the CMP process development as it is used for the current and ... -
A model of chemical mechanical planarization to predict impact of pad conditioning on process performance
Başım, Gül Bahar; Kincal, S. (Cambridge University Press, 2012)This study presents an effort to couple a wafer removal rate profile model based on the locally relevant Preston equation to the change in pad thickness profile which reflects to post polish profile of the wafers after ... -
A modeling study on the layout impact of with-in-die thickness range for STI CMP
Kıncal, S.; Başım, Gül Bahar (ECS, 2013)Chemical Mechanical Planarization process has a proven track record as an effective method for planarizing the wafer surface at multiple points of the semiconductor manufacturing flow. One of the most challenging aspects ... -
Nano-boron as an antibacterial agent for functionalized textiles
Akbar, Wazir; Karagöz, Ayşe; Başım, Gül Bahar; Noor, M.; Syed, T.; Lum, J.; Unluagac, M. (Cambridge University Press, 2015-01)The antibacterial properties of boron-containing compounds are well known although there are limited studies available on the pure boron nanoparticles. In this study boron nano-particles were characterized in terms of their ... -
Optimized process and tool design for gan chemical mechanical planarization
Ozbek, S.; Akbar, Wazir; Başım, Gül Bahar (The Electrochemical Society, 2017-10-04)In this paper, we present a systematic approach to the gallium nitride (GaN) chemical mechanical planarization (CMP) process through evaluating the effect of crystallographic orientation, slurry chemistry and process ... -
Particle size analysis on wide size distribution powders; effect of sampling and characterization technique
Başım, Gül Bahar; Khalili, M. (Elsevier, 2015-01)Particle size distribution of powders plays a very important role in determining the critical chemical and physical properties of the particulate systems. Precise determination of particle size distribution depends on ... -
Photocatalytic and antibacterial functionality evaluation of nanoboron coated textiles
Akbar, Wazir; Karagöz, Ayşe; Aktas, Gözde; Başım, Gül Bahar (2016-09-01)Antibacterial properties of boron-containing compounds are well known although studies available on pure boron nanoparticles are relatively limited. In the present study, we examine the feasibility of the application of ... -
The photocatalytic effects of textile materials treated with TiO2 and Fe/TiO2
Dumitrescu, I.; Iordache, O.; Popescu, A.; Varzaru, E.; Kim, S.; Başım, Gül Bahar; Ükelge, G. (Institutul Naţional de Cercetare-Dezvoltare pentru Textile şi Pielărie, 2015)The research has been focused on the photocatalytic activity of the textile materials treated with TiO2 and TiO2 iron doped by pad-dry-cure and cationization - pad-dry-cure. The fabrics have been exposed to UV and visible ... -
Self-cleaning ability quantization of textiles with degussa P-25
Cerhan, Asena; Güler, Zeynep Özdemir; Başım, Gül Bahar (Trans Tech Publications Inc., 2018)This study proposes a systematic quantification of effectiveness of the Degussa P-25 titania particles used as a benchmark in photocatalytic applications to standardize ability of self-cleaning textile applications and to ... -
Studies on slurry design fundamentals for advanced CMP applications
Başım, Gül Bahar; Karagöz, Ayşe; Özdemir, Zeynep; Vakarelski, I. U.; Chen, L. (ECS, 2013)New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ... -
Surface characterization driven CMP optimization for gallium nitride
Karagoz, Ayşe; Siebert, M.; Leunissen, P.; Başım, Gül Bahar (ECS, 2016)Gallium nitride is a hard and chemically inert material demoting high material removal rates in the chemical mechanical planarization (CMP) applications. This paper focuses on the optimization of the process conditions to ... -
Surface characterization of textiles for optimization of functional polymeric nano-capsule attachment
Akbar, Wazir; Başım, Gül Bahar (Carl Hanser Verlag, 2019-09)Surface properties of textiles play an essential role in their functionalization with micro/nanometer-sized polymeric capsules containing active agents that can provide controlled release. The attached capsules provide ... -
Surfactant mediated slurry formulations for Ge CMP applications
Başım, Gül Bahar; Karagöz, Ayşe; Chen, L.; Vakarelski, I. (Cambridge University Press, 2013)In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ... -
Tailoring silica nanotribology for CMP slurry optimization: Ca2+ cation competition in C12TAB mediated lubrication
Vakarelski, I. U.; Brown, S. C.; Başım, Gül Bahar; Rabinovich, Y. I.; Moudgil, B. M. (ACS, 2010-04-12)Self-assembled surfactant structures at the solid/liquid interface have been shown to act as nanoparticulate dispersants and are capable of providing a highly effective, self-healing boundary lubrication layer in aqueous ... -
Understanding selectivity on Germanium/SiO2 chemical mechanical planarization through design of experiments
Karagöz, Ayşe; Mal, J.; Başım, Gül Bahar (Cambridge University Press, 2015)The continuous trend of achieving more complex microelectronics with smaller nodes yet larger wafer sizes in microelectronics manufacturing lead to aggressive development requirements for chemical mechanical planarization ...
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