Search
Now showing items 621-630 of 3460
Studies on slurry design fundamentals for advanced CMP applications
(ECS, 2013)
New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ...
Metal CMP optimization based on chemically formed thin film analysis
(The Electrochemical Society, 2009)
The conventional demands for development in semiconductor industry are changing as the Moore's Law is approaching to its limits. This paper demonstrates a theoretical optimization approach for the planarization of metal ...
Hybrid job scheduling for improved cluster utilization
(Springer Science+Business Media, 2014)
In this paper, we investigate the models and issues as well as performance benefits of hybrid job scheduling over shared physical clusters. Clustering technologies that are currently supported include MPI, Hadoop-MapReduce ...
Improving selectivity on germanium CMP applications
(ECS, 2014)
In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical ...
Near-field thermal radiation transfer by mesoporous metamaterials
(The Optical Society, 2015-09-21)
In this work, we investigate the impact of nano-scale pores within structured metamaterials on spectral near-field radiative transfer. We use Finite Difference Time Domain Method (FDTD) and consider uniform and corrugated ...
Some remarks on the stability and instability properties of solitary waves for the double dispersion equation
(Estonian Academy of Sciences, 2015)
In this article we give a review of our recent results on the instability and stability properties of travelling wave solutions of the double dispersion equation utt − uxx + auxxxx − buxxtt = −(|u|p−1u)xx for p > 1, a ≥ b ...
Search for a standard model Higgs boson produced in association with a top-quark pair and decaying to bottom quarks using a matrix element method
(Springer Nature, 2015-06)
A search for a standard model Higgs boson produced in association with a top-quark pair and decaying to bottom quarks is presented. Events with hadronic jets and one or two oppositely charged leptons are selected from a ...
Calibration of 2D ultrasound in 3D space for robotic biopsies
(IEEE, 2015)
Freehand Ultrasound technique is widely used in intraoperative biopsy procedures for detecting the volumes of interest. Freehand ultrasound probe is faster and flexible with 6 degrees of freedom. Thats why the imaging ...
Metal oxide nano film characterization for CMP optimization
(ECS, 2013)
This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ...
Staged development of robot skills: behavior formation, affordance learning and imitation
(IEEE, 2015-06)
Inspired by infant development, we propose a three staged developmental framework for an anthropomorphic robot manipulator. In the first stage, the robot is initialized with a basic reach-and- enclose-on-contact movement ...
Share this page