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A Cahn-Hilliard modeling of metal oxide thin films for advanced CMP applications
(ECS, 2014)
Chemical mechanical planarization (CMP) process enables topographic selectivity through formation of a protective oxide thin film on the recessed locations of the deposited metal layer, while a continuous chemical oxidation ...
A Complete procedure for predicting and improving the performance of HAWT's
(IOP Publishing, 2014)
A complete procedure for predicting and improving the performance of the horizontal axis wind turbine (HAWT) has been developed. The first process is predicting the power extracted by the turbine and the derived rotor ...
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