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A prism-based non-linear optical readout method for MEMS cantilever arrays
(Elsevier, 2016-10-15)
This paper demonstrates the use of a single right-angle prism for the optical readout of micro-electro-mechanical systems (MEMS) cantilever arrays. The non-linear reflectivity arisen from the internal reflection at the ...
MEMS cantilever sensor array oscillators: Theory and experiments
(Elsevier, 2016-01-01)
This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved ...
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