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A prism-based non-linear optical readout method for MEMS cantilever arrays
(Elsevier, 2016-10-15)
This paper demonstrates the use of a single right-angle prism for the optical readout of micro-electro-mechanical systems (MEMS) cantilever arrays. The non-linear reflectivity arisen from the internal reflection at the ...
Optical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquid
(Elsevier, 2016-05-01)
This paper reports a novel method for simultaneous resonance monitoring of MEMS cantilevers using phase based dynamic measurements without any electrical connections to the sensor array. MEMS cantilevers are made of ...
MEMS cantilever sensor array oscillators: Theory and experiments
(Elsevier, 2016-01-01)
This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved ...
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