Browsing Faculty of Engineering by Author "Mal, J."
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Understanding selectivity on Germanium/SiO2 chemical mechanical planarization through design of experiments
Karagöz, Ayşe; Mal, J.; Başım, Gül Bahar (Cambridge University Press, 2015)The continuous trend of achieving more complex microelectronics with smaller nodes yet larger wafer sizes in microelectronics manufacturing lead to aggressive development requirements for chemical mechanical planarization ...
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