Browsing Mechanical Engineering by Issue Date
Now showing items 41-60 of 372
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Biomaterials applications of chemical mechanical polishing
(IEEE, 2012)Chemical Mechanical Polishing (CMP) is used in semiconductor industry to enable planarization of the interlayer dielectrics and metals. In this study, CMP is used as a polishing technique to modify the surface roughness ... -
A model of chemical mechanical planarization to predict impact of pad conditioning on process performance
(Cambridge University Press, 2012)This study presents an effort to couple a wafer removal rate profile model based on the locally relevant Preston equation to the change in pad thickness profile which reflects to post polish profile of the wafers after ... -
Characteristics of low reynolds number steady air jet impingement heat transfer over vertical flat surfaces
(IEEE, 2012)In this paper, heat transfer characteristics of single-slot steady-impinging air jets on a 25.4 mm × 25.4 mm vertical surface were experimentally investigated. The experiments were conducted with four different nozzles ... -
Absorption suppression of silver nanoparticles in the presence of an AFM tip: A harmonic oscillator model
(AIP, 2012)We numerically calculated the optical absorption of silver nanoparticles (AgNP) in the presence of metallic and dielectric AFM probes, illuminated by transverse magnetic (TM) polarized, total internal reflected waves. ... -
Advanced slurry formulations for new generation chemical mechanical planarization (CMP) applications
(Cambridge University Press, 2012-01)Chemical Mechanical Planarization (CMP) is widely used to ensure planarity of metal and dielectric surfaces to enable photolithography and hence multilevel metallization in microelectronics manufacturing. The aim of this ... -
Evaluation of infection resistance of biological implants through CMP based micro-patterning
(Cambridge University Press, 2012-01)Biomaterials are widely used for dental implants, orthopedic devices, cardiac pacemakers and catheters. One of the main concerns on using bio-implants is the risk of infection on the materials used. In this study, our aim ... -
Credible intervals for nanoparticle characteristics
(Elsevier, 2012-01)Solving the inverse problem of nanoparticle characterization has the potential to advance science and benefit society. While considerable progress has been made within a framework based on the scattering of surface ... -
The cauchy problem for a one-dimensional nonlinear elastic peridynamic model
(Elsevier, 2012-04-15)This paper studies the Cauchy problem for a one-dimensional nonlinear peridynamic model describing the dynamic response of an infinitely long elastic bar. The issues of local well-posedness and smoothness of the solutions ... -
Predicting heat transfer from unsteady synthetic jets
(ASME, 2012-05-31)Synthetic jets are piezo-driven, small-scale, pulsating devices capable of producing highly turbulent jets formed by periodic entrainment and expulsion of the fluid in which they are embedded. The compactness of these ... -
JQSRT impact factor and Elsevier Benedict and Poynting Awards
(Elsevier, 2012-11)We are very pleased to inform the JQSRT readers and authors of several important recent developments about the Journal. First of all, according to the ISI Journal Citation Reports database, the 2011 Impact Factor for JQSRT ... -
Boiling heat transfer enhancement of magnetically actuated nanofluids
(AIP, 2013)Nanofluids offer a potential breakthrough as next-generation heat transfer fluids since they offer exciting new possibilities to enhance heat transfer performance compared to pure liquids. A major drawback for using ... -
Steady and unsteady air impingement heat transfer for electronics cooling applications
(ASME, 2013)This paper focuses on two forced convection methods—steady jet flow and pulsating flow by synthetic jets—that can be used in applications requiring significant amounts of heat removal from electronics components. Given the ... -
A numerical study of a single unsteady laminar slot jet in a confined structure
(ASME, 2013)With the inherit advantages of air cooling, jet impingement can produce a factor of two or higher heat transfer than conventional fan flow over bodies. Therefore, impinging jets can solve a number of electronics thermal ... -
A modeling study on the layout impact of with-in-die thickness range for STI CMP
(ECS, 2013)Chemical Mechanical Planarization process has a proven track record as an effective method for planarizing the wafer surface at multiple points of the semiconductor manufacturing flow. One of the most challenging aspects ... -
Studies on slurry design fundamentals for advanced CMP applications
(ECS, 2013)New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ... -
Surfactant mediated slurry formulations for Ge CMP applications
(Cambridge University Press, 2013)In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ... -
Metal oxide nano film characterization for CMP optimization
(ECS, 2013)This paper focuses on the planarization of metallic films in microelectronics manufacturing by CMP through investigation of metal oxide thin films forming as a result of the chemical component of the process. Tungsten ... -
Direct liquid cooling of high flux LED systems: hot spot abatement
(ASME, 2013)With the recent advances in wide band gap device technology, solid-state lighting (SSL) has become favorable for many lighting applications due to energy savings, long life, green nature for environment, and exceptional ... -
Characterization of chemically modified thin films for optimization of metal CMP applications?
(Cambridge University Press, 2013)Metal CMP applications necessitate the formation of a protective oxide film in the presence of surface active agents, oxidizers, pH regulators and other chemicals to achieve global planarization. Formation and mechanical ... -
Heart motion prediction based on adaptive estimation algorithms for robotic assisted beating heart surgery
(IEEE, 2013)Robotic-assisted beating heart surgery aims to allow surgeons to operate on a beating heart without stabilizers as if the heart is stationary. The robot actively cancels heart motion by closely following a point of interest ...
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