Improving selectivity on germanium CMP applications
dc.contributor.author | Karagöz, Ayşe | |
dc.contributor.author | Başım, Gül Bahar | |
dc.date.accessioned | 2016-02-17T06:33:28Z | |
dc.date.available | 2016-02-17T06:33:28Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | http://hdl.handle.net/10679/2803 | |
dc.identifier.uri | http://ecst.ecsdl.org/content/61/17/37.abstract | |
dc.description | Due to copyright restrictions, the access to the full text of this article is only available via subscription. | |
dc.description.abstract | In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical planarization applications. It was observed that the very strong or loose self-assembled surfactant structures can help obtain selectivity on the silica/germanium systems. Simultaneously, good defectivity control with a sufficient material removal rate was obtained. The surface charges manipulated by the surfactant adsorption and the hydrophobic nature of the germanium surface were main criteria on the selection of the proper surfactant/oxidizer system. In addition, impact of surfactant addition on particle-particle interactions controlling slurry stability was also investigated in the paper. | |
dc.description.sponsorship | European Commission | |
dc.language.iso | eng | en_US |
dc.publisher | ECS | |
dc.relation | info:eu-repo/grantAgreement/EC/FP7/256348 | |
dc.relation.ispartof | ECS Transactions | |
dc.rights | restrictedAccess | |
dc.title | Improving selectivity on germanium CMP applications | en_US |
dc.type | Conference paper | en_US |
dc.peerreviewed | yes | |
dc.publicationstatus | published | en_US |
dc.contributor.department | Özyeğin University | |
dc.contributor.authorID | (ORCID 0000-0002-2049-4410 & YÖK ID 124618) Başım, Bahar | |
dc.contributor.ozuauthor | Başım, Gül Bahar | |
dc.identifier.volume | 61 | |
dc.identifier.issue | 17 | |
dc.identifier.startpage | 37 | |
dc.identifier.endpage | 41 | |
dc.identifier.wos | WOS:000359709200005 | |
dc.identifier.doi | 10.1149/06117.0037ecst | |
dc.identifier.scopus | SCOPUS:2-s2.0-84925339915 | |
dc.contributor.ozugradstudent | Karagöz, Ayşe | |
dc.contributor.authorFemale | 2 | |
dc.relation.publicationcategory | Conference Paper - International - Institutional Academic Staff and PhD Student |
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