Browsing by Author "Başım, Gül Bahar"
Now showing items 41-43 of 43
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Surfactant mediated slurry formulations for Ge CMP applications
Başım, Gül Bahar; Karagöz, Ayşe; Chen, L.; Vakarelski, I. (Cambridge University Press, 2013)In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ... -
Tailoring silica nanotribology for CMP slurry optimization: Ca2+ cation competition in C12TAB mediated lubrication
Vakarelski, I. U.; Brown, S. C.; Başım, Gül Bahar; Rabinovich, Y. I.; Moudgil, B. M. (ACS, 2010-04-12)Self-assembled surfactant structures at the solid/liquid interface have been shown to act as nanoparticulate dispersants and are capable of providing a highly effective, self-healing boundary lubrication layer in aqueous ... -
Understanding selectivity on Germanium/SiO2 chemical mechanical planarization through design of experiments
Karagöz, Ayşe; Mal, J.; Başım, Gül Bahar (Cambridge University Press, 2015)The continuous trend of achieving more complex microelectronics with smaller nodes yet larger wafer sizes in microelectronics manufacturing lead to aggressive development requirements for chemical mechanical planarization ...
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