Cakmak, O.Ermek, E.Kilinc, N.Yaralıoğlu, Göksen GökseninUrey, H.2016-06-302016-06-3020152160-5033http://hdl.handle.net/10679/4152https://doi.org/10.1109/OMN.2015.7288898Due to copyright restrictions, the access to the full text of this article is only available via subscription.Viscosity and density measurements in liquids in real-time is challenging. Previous MEMS based approaches use frequency sweeps for the purpose and those methods are slow and not real-time. We show that high precision viscosity and density measurements are possible using two cantilevers with different widths and by tracking their frequencies with a Phase-Locked-Loop in real-time.enginfo:eu-repo/semantics/restrictedAccessConference paper1200038051300007710.1109/OMN.2015.7288898MEMSMicrocantilever SensorViscosityDensity2-s2.0-84958580574