Özdemir, ZeynepBaşım, Gül Bahar2017-07-112017-07-1120172352-3409http://hdl.handle.net/10679/5437https://doi.org/10.1016/j.dib.2016.11.065Bioactivity of titanium depends on the quality and characteristics of its surface oxide film. Through implementation of chemical mechanical polishing (CMP) process on titanium plates, a protective oxide (titania) film grows on the titanium based implant surface. In this article, surface properties of the titanium oxide are investigated as a function of the CMP process conditions. Surface responses were evaluated in terms of wettability, nano-scale surface roughness and material removal rates (MRR). Surface chemical compositions were also evaluated through Fourier transform infrared spectroscopy (FT-IR).engrestrictedAccessEffect of chemical mechanical polishing on surface nature of titanium implants FT-IR and wettability data of titanium implants surface after chemical mechanical polishing implementationarticle10202510.1016/j.dib.2016.11.0652-s2.0-85017307189