Lüleç, S. Z.Adiyan, U.Yaralıoğlu, Göksen GökseninLeblebici, Y.Urey, H.2016-02-162016-02-162015978-1-4673-6834-62160-5033http://hdl.handle.net/10679/2529https://doi.org/10.1109/OMN.2015.7288835Due to copyright restrictions, the access to the full text of this article is only available via subscription.MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.enginfo:eu-repo/semantics/restrictedAccessConference paper1200038051300001410.1109/OMN.2015.7288835MEMS cantilever sensor arraysMultiple selfsustained oscillationInterferometric readout2-s2.0-84958559650