Adelegan, O. J.Kemal, Remzi ErkanYamaner, F. Y.Dayton, P. A.Oralkan, Ö.2020-04-142020-04-142018-12-20978-1-5386-3425-71948-5719http://hdl.handle.net/10679/6509https://doi.org/10.1109/ULTSYM.2018.8579874For superharmonic imaging applications involving the use of microbubble contrast agents, transducers that can transmit energy at low frequencies (less than 5 MHz) to excite the microbubbles, and at the same time detect scattered echoes at higher harmonics (greater than 20 MHz) are essential. We explored the advantages of a thin silicon plate with an added central mass combined with a reduced bottom electrode area to further improve the bandwidth of 1D capacitive micromachined ultrasonic transducer arrays. FEM simulation results show that the fabricated devices can transmit at low frequency (<;3 MHz) and receive echoes at high frequency (beyond 30 MHz). This translates into a 180% fractional bandwidth at 17 MHz for the fabricated 1D CMUT array.enginfo:eu-repo/semantics/restrictedAccessConference paper201800045869300019410.1109/ULTSYM.2018.8579874Acoustic angiographyHigh-frequencyUltra-widebandAnodic bondingCMUT2-s2.0-85060643539