Bulgan, Erdal2016-07-262016-07-2620102162-2701http://hdl.handle.net/10679/4278Due to copyright restrictions, the access to the full text of this article is only available via subscription.Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.engrestrictedAccessconferenceObjectDisplacement sensingOptical sensingSilicon photonic devices2-s2.0-84897747859