Optical subwavelength-scale displacement sensing with dynamically controllable characteristics

Bulgan, Erdal

dc.contributor.author	Bulgan, Erdal
dc.date.accessioned	2016-07-26T12:21:38Z
dc.date.available	2016-07-26T12:21:38Z
dc.date.issued	2010
dc.identifier.issn	2162-2701
dc.identifier.uri	http://hdl.handle.net/10679/4278
dc.identifier.uri	https://www.osapublishing.org/abstract.cfm?uri=Sensors-2010-SWD5
dc.description	Due to copyright restrictions, the access to the full text of this article is only available via subscription.
dc.description.abstract	Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.
dc.language.iso	eng	en_US
dc.publisher	The Optical Society
dc.relation.ispartof	Optics InfoBase Conference Papers
dc.rights	restrictedAccess
dc.title	Optical subwavelength-scale displacement sensing with dynamically controllable characteristics	en_US
dc.type	Conference paper	en_US
dc.publicationstatus	published	en_US
dc.contributor.department	Özyeğin University
dc.contributor.authorID	(ORCID & YÖK ID 113204) Bulgan, Erdal
dc.contributor.ozuauthor	Bulgan, Erdal
dc.subject.keywords	Displacement sensing
dc.subject.keywords	Optical sensing
dc.subject.keywords	Silicon photonic devices
dc.identifier.scopus	SCOPUS:2-s2.0-84897747859
dc.contributor.authorMale	1
dc.relation.publicationcategory	Conference Paper - Institutional Academic Staff