Optical subwavelength-scale displacement sensing with dynamically controllable characteristics
Author
Type :
Conference paper
Publication Status :
published
Access :
restrictedAccess
Abstract
Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.
Source :
Optics InfoBase Conference Papers
Date :
2010
Publisher :
The Optical Society
URI
http://hdl.handle.net/10679/4278https://www.osapublishing.org/abstract.cfm?uri=Sensors-2010-SWD5
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