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dc.contributor.authorLulec, S. Z.
dc.contributor.authorAdiyan, U.
dc.contributor.authorYaralıoğlu, Göksen Göksenin
dc.contributor.authorLeblebici, Y.
dc.contributor.authorUrey, H.
dc.date.accessioned2016-06-29T13:04:23Z
dc.date.available2016-06-29T13:04:23Z
dc.date.issued2016-01-01
dc.identifier.issn0924-4247
dc.identifier.urihttp://hdl.handle.net/10679/4055
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S0924424715302466
dc.descriptionDue to copyright restrictions, the access to the full text of this article is only available via subscription.
dc.description.abstractThis paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved in a feed-back loop using gain saturation mechanism in the electronics. Multiple cantilevers require separate saturation mechanisms and separate sensing electronics for each channel. We introduced optical non-linearity using diffraction gratings at the tip of each cantilever which provide separate saturation non-linearity, enabling a single detector based oscillator array. Two-cantilever SSO operation is investigated analytically, and the multiple frequency oscillation criteria are established. Cross-coupling between the oscillation frequencies has been investigated by using this multi cantilever model. The proposed model will be helpful to design dynamic‑mode MEMS (Micro-electro-mechanical systems) cantilever sensor arrays with the desired functionality and cross-talk levels. This multiple SSO operation can be used in conjunction with dense cantilever arrays for various biosensor applications. Moreover, the model can also be useful to understand the operation of any kind of multiple simultaneous oscillator systems, which employs a single feed-back loop. We also present experimental results that confirm our model.
dc.description.sponsorshipTÜBİTAK
dc.language.isoengen_US
dc.publisherElsevier
dc.relationinfo:turkey/grantAgreement/TUBITAK/113S074
dc.relationinfo:turkey/grantAgreement/TUBITAK/111E184
dc.relation.ispartofSensors and Actuators A: Physical
dc.rightsrestrictedAccess
dc.titleMEMS cantilever sensor array oscillators: Theory and experimentsen_US
dc.typeArticleen_US
dc.peerreviewedyes
dc.publicationstatuspublisheden_US
dc.contributor.departmentÖzyeğin University
dc.contributor.authorID(ORCID 0000-0002-3242-5797 & YÖK ID 192045) Yaralıoğlu, Göksenin
dc.contributor.ozuauthorYaralıoğlu, Göksen Göksenin
dc.identifier.volume237
dc.identifier.startpage147
dc.identifier.endpage154
dc.identifier.wosWOS:000369201500018
dc.identifier.doi10.1016/j.sna.2015.11.028
dc.subject.keywordsBiosensors
dc.subject.keywordsMEMS cantilever sensor arrays
dc.subject.keywordsMultiple self-sustained oscillation
dc.subject.keywordsInterferometric readout
dc.subject.keywordsDiffraction grating
dc.identifier.scopusSCOPUS:2-s2.0-84951335309
dc.contributor.authorMale1


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