Biomaterials applications of chemical mechanical polishing
dc.contributor.author | Başım, Gül Bahar | |
dc.contributor.author | Özdemir, Zeynep | |
dc.contributor.author | Mutlu, Ö. | |
dc.date.accessioned | 2016-02-17T06:33:26Z | |
dc.date.available | 2016-02-17T06:33:26Z | |
dc.date.issued | 2012 | |
dc.identifier.isbn | 978-3-8007-3452-8 | |
dc.identifier.uri | http://hdl.handle.net/10679/2788 | |
dc.identifier.uri | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6353813 | |
dc.description | Due to copyright restrictions, the access to the full text of this article is only available via subscription. | |
dc.description.abstract | Chemical Mechanical Polishing (CMP) is used in semiconductor industry to enable planarization of the interlayer dielectrics and metals. In this study, CMP is used as a polishing technique to modify the surface roughness of the bio-implant materials in a controlled manner. As an alternative technique to sand-blasting/etching or laser structuring on the implant surfaces, CMP results in formation of a protective oxide layer on the titanium surfaces that can limit surface contamination while enabling surface nano-structuring that is known to promote bioactivity. Keywords: CMP, Titanium Implants, Biomaterials, Micro-Patterning. | |
dc.description.uri | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6353813&tag=1 | |
dc.language.iso | eng | en_US |
dc.publisher | IEEE | |
dc.relation.ispartof | IEEE Transactions | |
dc.relation.ispartof | Planarization/CMP Technology (ICPT 2012), International Conference on | |
dc.rights | restrictedAccess | |
dc.title | Biomaterials applications of chemical mechanical polishing | en_US |
dc.type | Conference paper | en_US |
dc.peerreviewed | yes | |
dc.publicationstatus | published | en_US |
dc.contributor.department | Özyeğin University | |
dc.contributor.authorID | (ORCID 0000-0002-2049-4410 & YÖK ID 124618) Başım, Bahar | |
dc.contributor.ozuauthor | Başım, Gül Bahar | |
dc.identifier.startpage | 1 | |
dc.identifier.endpage | 5 | |
dc.subject.keywords | CMP | |
dc.subject.keywords | Titanium implants | |
dc.subject.keywords | Biomaterials | |
dc.subject.keywords | Micro-patterning | |
dc.contributor.ozugradstudent | Özdemir, Zeynep | |
dc.contributor.authorFemale | 2 | |
dc.relation.publicationcategory | Conference Paper - International - Institutional Academic Staff and PhD Student |
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