Publication:
Cantilever array oscillators with nonlinear optical readout

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conferenceObject

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Conference paper

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restrictedAccess

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published

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Abstract

MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.

Date

2015

Publisher

IEEE

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