Publication: Cantilever array oscillators with nonlinear optical readout
Institution Authors
Journal Title
Journal ISSN
Volume Title
Type
conferenceObject
Sub Type
Conference paper
Access
restrictedAccess
Publication Status
published
Abstract
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
Date
2015
Publisher
IEEE
Description
Due to copyright restrictions, the access to the full text of this article is only available via subscription.