Publication:
Resolving 500 nm axial separation by multi-slice X-ray ptychography

dc.contributor.authorHuang, X.
dc.contributor.authorYan, H.
dc.contributor.authorGe, M.
dc.contributor.authorÖztürk, Hande
dc.contributor.authorFang, Y.-L. L.
dc.contributor.authorHa, S.
dc.contributor.authorLin, M.
dc.contributor.authorLu, M.
dc.contributor.authorNazaretski, E.
dc.contributor.authorRobinson, I. K.
dc.contributor.authorChu, Y. S.
dc.contributor.departmentMechanical Engineering
dc.contributor.ozuauthorKAYMAKSÜT, Hande Öztürk
dc.date.accessioned2020-09-08T10:25:00Z
dc.date.available2020-09-08T10:25:00Z
dc.date.issued2019-03
dc.description.abstractMulti-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. The enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.en_US
dc.description.sponsorshipLaboratory Directed Research and Development program from the Brookhaven National Laboratory ; United States Department of Energy (DOE)
dc.description.versionPublisher versionen_US
dc.identifier.doi10.1107/S2053273318017229en_US
dc.identifier.endpage341en_US
dc.identifier.issn2053-2733en_US
dc.identifier.scopus2-s2.0-85061493285
dc.identifier.startpage336en_US
dc.identifier.urihttp://hdl.handle.net/10679/6920
dc.identifier.urihttps://doi.org/10.1107/S2053273318017229
dc.identifier.volume75en_US
dc.identifier.wos000460056400012
dc.language.isoengen_US
dc.peerreviewedyesen_US
dc.publicationstatusPublisheden_US
dc.publisherInternational Union of Crystallographyen_US
dc.relation.ispartofActa Crystallographica Section A: Foundations and Advances
dc.relation.publicationcategoryInternational Refereed Journal
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subject.keywordsX-ray ptychographyen_US
dc.subject.keywordsMulti-slice approachen_US
dc.subject.keywordsNanostructuresen_US
dc.titleResolving 500 nm axial separation by multi-slice X-ray ptychographyen_US
dc.typeArticleen_US
dspace.entity.typePublication
relation.isOrgUnitOfPublicationdaa77406-1417-4308-b110-2625bf3b3dd7
relation.isOrgUnitOfPublication.latestForDiscoverydaa77406-1417-4308-b110-2625bf3b3dd7

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