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Optical subwavelength-scale displacement sensing with dynamically controllable characteristics

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dc.contributor.authorBulgan, Erdal
dc.contributor.departmentMechanical Engineering
dc.contributor.ozuauthorBULGAN, Erdal
dc.date.accessioned2016-07-26T12:21:38Z
dc.date.available2016-07-26T12:21:38Z
dc.date.issued2010
dc.descriptionDue to copyright restrictions, the access to the full text of this article is only available via subscription.
dc.description.abstractSilicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.
dc.identifier.issn2162-2701
dc.identifier.scopus2-s2.0-84897747859
dc.identifier.urihttp://hdl.handle.net/10679/4278
dc.language.isoengen_US
dc.publicationstatuspublisheden_US
dc.publisherThe Optical Society
dc.relation.ispartofOptics InfoBase Conference Papers
dc.relation.publicationcategoryInternational
dc.rightsrestrictedAccess
dc.subject.keywordsDisplacement sensing
dc.subject.keywordsOptical sensing
dc.subject.keywordsSilicon photonic devices
dc.titleOptical subwavelength-scale displacement sensing with dynamically controllable characteristicsen_US
dc.typeconferenceObjecten_US
dspace.entity.typePublication
relation.isOrgUnitOfPublicationdaa77406-1417-4308-b110-2625bf3b3dd7
relation.isOrgUnitOfPublication.latestForDiscoverydaa77406-1417-4308-b110-2625bf3b3dd7

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