Publication: Optical subwavelength-scale displacement sensing with dynamically controllable characteristics
Institution Authors
Authors
Journal Title
Journal ISSN
Volume Title
Type
Conference paper
Access
info:eu-repo/semantics/restrictedAccess
Publication Status
published
Abstract
Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.
Date
2010
Publisher
The Optical Society
Description
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