Publication: Optical subwavelength-scale displacement sensing with dynamically controllable characteristics
Institution Authors
Authors
Journal Title
Journal ISSN
Volume Title
Type
conferenceObject
Access
restrictedAccess
Publication Status
published
Abstract
Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.
Date
2010
Publisher
The Optical Society
Description
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