Publication:
Optical subwavelength-scale displacement sensing with dynamically controllable characteristics

Placeholder

Institution Authors

Research Projects

Journal Title

Journal ISSN

Volume Title

Type

Conference paper

Access

info:eu-repo/semantics/restrictedAccess

Publication Status

published

Journal Issue

Abstract

Silicon photonic devices with embedded MEMS have significantly been studied. Characterization and operation of such devices in the nanometer-level is critical. A novel optical technique for subwavelength displacement measurements with dynamically controllable characteristics is introduced.

Date

2010

Publisher

The Optical Society

Description

Due to copyright restrictions, the access to the full text of this article is only available via subscription.

Keywords

Citation


Page Views

0

File Download

0