Browsing by Author "Vakarelski, I."

Now showing items 1-1 of 1

Surfactant mediated slurry formulations for Ge CMP applications

Başım, Gül Bahar; Karagöz, Ayşe; Chen, L.; Vakarelski, I. (Cambridge University Press, 2013)

In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ...