Browsing by Author "Karagoz, Ayşe"

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Metal oxide thin film characterization for new generation chemical mechanical planarization development

Başım, Gül Bahar; Karagoz, Ayşe (The Electrochemical Society, 2016)

This study targets to create a basis for the process development in the new generation semiconductor industry dealing with atomic scale devices. We focus on the CMP process development as it is used for the current and ...
Surface characterization driven CMP optimization for gallium nitride

Karagoz, Ayşe; Siebert, M.; Leunissen, P.; Başım, Gül Bahar (ECS, 2016)

Gallium nitride is a hard and chemically inert material demoting high material removal rates in the chemical mechanical planarization (CMP) applications. This paper focuses on the optimization of the process conditions to ...

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