Browsing by Author "Mutlu, Ö."
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Biomaterials applications of chemical mechanical polishing
Başım, Gül Bahar; Özdemir, Zeynep; Mutlu, Ö. (IEEE, 2012)Chemical Mechanical Polishing (CMP) is used in semiconductor industry to enable planarization of the interlayer dielectrics and metals. In this study, CMP is used as a polishing technique to modify the surface roughness ...
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