Browsing by Author "Özbek, Şebnem"
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Gallium nitride chemical mechanical planarization development through tool set-up, process and post CMP cleaning optimization
Özbek, Şebnem (2018-07)In this thesis, a new Chemical Mechanical Planarization (CMP) process and a complementary tool set-up are introduced to enhance Gallium Nitride (GaN) material removal rates while controlling the post planarization surface ...
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