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dc.contributor.authorHii, K.-F.
dc.contributor.authorVallance, R. R.
dc.contributor.authorMengüç, Mustafa Pınar
dc.date.accessioned2010-08-27T07:41:13Z
dc.date.available2010-08-27T07:41:13Z
dc.date.issued2010-04
dc.identifier.issn0141-6359
dc.identifier.urihttp://hdl.handle.net/10679/94
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S0141635909000828
dc.descriptionDue to copyright restrictions, the access to the full text of this article is only available via subscription.en_US
dc.description.abstractThis paper presents the design, operation, and motion characteristics of a precise piezoelectric motor for linear translation. The motor is compact, thermally stable, ultra-high vacuum compatible, and suitable for applications requiring fine resolution over millimeter-long travel ranges. Inside the motor, a translating alumina prism is symmetrically constrained within a stationary structure by a compliant suspension that preloads six shear-mode piezoelectric actuators against flat surfaces on the prism. A single step is achieved by sequentially sliding each piezoelectric actuator backward along the prism’s surfaces and then simultaneously moving all actuators forward. Many steps are repeated at 60 Hz for longer translations. Experiments indicate that: the step size is adjustable between 5 nm and 225 nm, the motor can reach speeds of 13.5 View the MathML sourcem/s, the step size is highly uniform with a standard deviation of about 1.2 nm, error motion in the direction orthogonal to the translation is about 800 nm peak-to-valley, and the thermal stability is better than 40 nm/ °C.en_US
dc.description.sponsorshipNSF
dc.language.isoengen_US
dc.publisherElsevieren_US
dc.relation.ispartofPrecision Engineering
dc.rightsrestrictedAccess
dc.titleDesign, operation, and motion characteristics of a precise piezoelectric linear motoren_US
dc.typeArticleen_US
dc.peerreviewedyesen_US
dc.publicationstatuspublisheden_US
dc.contributor.departmentÖzyeğin University
dc.contributor.authorID(ORCID 0000-0001-5483-587X & YÖK ID 141825) Mengüç, Pınar
dc.contributor.ozuauthorMengüç, Mustafa Pınar
dc.identifier.volume34
dc.identifier.issue2
dc.identifier.startpage231
dc.identifier.endpage241
dc.identifier.wosWOS:000275777900003
dc.identifier.doi10.1016/j.precisioneng.2009.06.005
dc.subject.keywordsNanopositioningen_US
dc.subject.keywordsActuatoren_US
dc.subject.keywordsMotoren_US
dc.subject.keywordsPiezoelectric materialen_US
dc.subject.keywordsThermal stabilityen_US
dc.subject.keywordsVacuum compatibilityen_US
dc.identifier.scopusSCOPUS:2-s2.0-75749096020
dc.contributor.authorMale1
dc.relation.publicationcategoryArticle - International Refereed Journal - Institutional Academic Staff


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