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dc.contributor.authorKaragöz, Ayşe
dc.contributor.authorŞengül, Yasemin
dc.contributor.authorBaşım, Gül Bahar
dc.date.accessioned2016-04-05T12:00:48Z
dc.date.available2016-04-05T12:00:48Z
dc.date.issued2014
dc.identifier.issn1938-5862
dc.identifier.urihttp://hdl.handle.net/10679/4013
dc.identifier.urihttp://ecst.ecsdl.org/content/61/17/15.abstract
dc.descriptionDue to copyright restrictions, the access to the full text of this article is only available via subscription.
dc.description.abstractChemical mechanical planarization (CMP) process enables topographic selectivity through formation of a protective oxide thin film on the recessed locations of the deposited metal layer, while a continuous chemical oxidation reaction is followed by mechanical abrasion takes place on the protruding locations. This paper demonstrates a new approach to CMP process optimization in terms of analyzing the nano-scale surface topography of the protective metal oxide films and modeling their growth through a Cahn-Hilliard equation (CHE) approach as an alternative to classical nucleation theory. It is observed that the material removal rate mechanisms and the consequent planarization performance depend on the nature of nucleation of the metal oxide films, which is a function of the oxidizer concentration of the CMP slurry.
dc.language.isoengen_US
dc.publisherECSen_US
dc.relation.ispartofECS Journal of Solid State Science and Technologyen_US
dc.rightsrestrictedAccess
dc.titleA Cahn-Hilliard modeling of metal oxide thin films for advanced CMP applicationsen_US
dc.typeArticleen_US
dc.peerreviewedyes
dc.publicationstatusPublisheden_US
dc.contributor.departmentÖzyeğin University
dc.contributor.authorID(ORCID 0000-0001-5923-3173 & YÖK ID 225540) Şengül, Yasemin
dc.contributor.authorID(ORCID 0000-0002-2049-4410 & YÖK ID 124618) Başım, Bahar
dc.contributor.ozuauthorŞengül, Yasemin
dc.contributor.ozuauthorBaşım, Gül Bahar
dc.identifier.startpage15
dc.identifier.endpage20
dc.identifier.wosWOS:000359709200002
dc.identifier.doi10.1149/06117.0015ecst
dc.subject.keywordsSpinodal decompositionen_US
dc.subject.keywordsPhase-separationen_US
dc.subject.keywordsOptimizationen_US
dc.identifier.scopusSCOPUS:2-s2.0-84925332844
dc.contributor.ozugradstudentKaragöz, Ayşe
dc.contributor.authorFemale3


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