Cantilever array oscillators with nonlinear optical readout
Type :
Conference paper
Publication Status :
published
Access :
restrictedAccess
Abstract
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
Source :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Date :
2015
Publisher :
IEEE
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