Browsing by Author "Chen, L."
Now showing items 1-2 of 2
-
Studies on slurry design fundamentals for advanced CMP applications
Başım, Gül Bahar; Karagöz, Ayşe; Özdemir, Zeynep; Vakarelski, I. U.; Chen, L. (ECS, 2013)New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials is germanium which enables ... -
Surfactant mediated slurry formulations for Ge CMP applications
Başım, Gül Bahar; Karagöz, Ayşe; Chen, L.; Vakarelski, I. (Cambridge University Press, 2013)In this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) ...
Share this page