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dc.contributor.authorKemal, Remzi Erkan
dc.contributor.authorBozkurt, A.
dc.contributor.authorYaralıoğlu, Göksen Göksenin
dc.date.accessioned2020-12-29T09:08:49Z
dc.date.available2020-12-29T09:08:49Z
dc.date.issued2020-12
dc.identifier.issn0946-7076en_US
dc.identifier.urihttp://hdl.handle.net/10679/7190
dc.identifier.urihttps://link.springer.com/article/10.1007/s00542-020-04849-y
dc.description.abstractEquivalent circuit models have been long used to evaluate the dynamics of the capacitive micromachined ultrasonic transducer (CMUT). An important parameter in the characterization of a CMUT is the anti-resonance frequency, which limits the immersion bandwidth. However, there is no equivalent circuit model that can accurately determine the anti-resonance frequency of a membrane. In this work, we present an improved lumped element parametric model for immersed CMUT. We demonstrate that the proposed equivalent circuit model accurately predicts anti-resonance and higher order mode frequencies, in addition to that of the fundamental mode. The proposed circuit model is in good agreement with device characteristics calculated using the finite element method and experimentally measured data.en_US
dc.language.isoengen_US
dc.publisherSpringer Natureen_US
dc.relation.ispartofMicrosystem Technologies
dc.rightsrestrictedAccess
dc.titleEquivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonancesen_US
dc.typeArticleen_US
dc.peerreviewedyesen_US
dc.publicationstatusPublisheden_US
dc.contributor.departmentÖzyeğin University
dc.contributor.authorID(ORCID 0000-0002-3242-5797 & YÖK ID 192045) Yaralıoğlu, Göksenin
dc.contributor.ozuauthorYaralıoğlu, Göksen Göksenin
dc.identifier.volume26en_US
dc.identifier.issue12en_US
dc.identifier.startpage3747en_US
dc.identifier.endpage3752en_US
dc.identifier.wosWOS:000528514700002
dc.identifier.doi10.1007/s00542-020-04849-yen_US
dc.identifier.scopusSCOPUS:2-s2.0-85084131848
dc.contributor.ozugradstudentKemal, Remzi Erkan
dc.contributor.authorMale2
dc.relation.publicationcategoryArticle - International Refereed Journal - Institution Academic Staff and Graduate Student


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