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dc.contributor.authorMostafazadeh, A.
dc.contributor.authorYaralıoğlu, Göksen Göksenin
dc.contributor.authorUrey, H.
dc.date.accessioned2016-06-29 T13:04:27Z
dc.date.available2016-06-29T13:04:27Z
dc.date.issued2016-05-01
dc.identifier.issn0924-4247
dc.identifier.urihttp://hdl.handle.net/10679/4076
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S0924424716301030
dc.descriptionDue to copyright restrictions, the access to the full text of this article is only available via subscription.
dc.description.abstractThis paper reports a novel method for simultaneous resonance monitoring of MEMS cantilevers using phase based dynamic measurements without any electrical connections to the sensor array. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using an electro-coil. To our knowledge this is the first demonstration of simultaneous parallel optical monitoring of dynamic mode micro-cantilever array in liquid environment. Illumination is generated using a laser source and a diffractive pattern generator, which provides 500 μW laser power per channel. A compact fiber array based pick-up was built for optical readout. Its main advantages are easy customization to different size and pitch of sensor array, and good immunity to electrical noise and magnetic interference as the photo detectors are located away from the electro-coil. The resonant frequency of the cantilever is tracked with a custom multi-channel lock-in amplifier implemented in software. For demonstrating the stability and sensitivity of the system we performed measurements using glycerol solutions with different viscosities. Measured phase sensitivity was 0.9°/1% of Glycerol/DI-water solution and the standard deviation of measured phase was 0.025°. The resulting detection limit for Glycerol/DI-water solution was 280 ppm. The proposed method showed robust results with low laser power and very good noise immunity to interference signals and environmental vibrations. The sensor technology demonstrated here is very significant as it is scalable to larger arrays for simultaneous and real- time monitoring of multiple biological and chemical agents during fluid flow.
dc.description.sponsorshipTÜBİTAK
dc.language.isoengen_US
dc.publisherElsevier
dc.relationinfo:turkey/grantAgreement/TUBITAK/111E184
dc.relationinfo:turkey/grantAgreement/TUBITAK/113S074
dc.relation.ispartofSensors and Actuators, A: Physical
dc.rightsrestrictedAccess
dc.titleOptical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquiden_US
dc.typeArticleen_US
dc.peerreviewedyes
dc.publicationstatuspublisheden_US
dc.contributor.departmentÖzyeğin University
dc.contributor.authorID(ORCID 0000-0002-3242-5797 & YÖK ID 192045) Yaralıoğlu, Göksenin
dc.contributor.ozuauthorYaralıoğlu, Göksen Göksenin
dc.identifier.volume242
dc.identifier.startpage132
dc.identifier.endpage139
dc.identifier.wosWOS:000374614300018
dc.identifier.doi10.1016/j.sna.2016.03.004
dc.subject.keywordsMEMS sensors in liquid
dc.subject.keywordsMultichannel resonant frequency tracking
dc.subject.keywordsOptical fiber array readout
dc.subject.keywordsMagnetic actuation
dc.subject.keywordsMultichannel lock-in amplifier
dc.subject.keywordsPhase based resonance tracking
dc.identifier.scopusSCOPUS:2-s2.0-84960121206
dc.contributor.authorMale1


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