Browsing by Subject "Interferometric readout"
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Cantilever array oscillators with nonlinear optical readout
(IEEE, 2015)MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators ... -
MEMS cantilever sensor array oscillators: Theory and experiments
(Elsevier, 2016-01-01)This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved ...
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