Browsing by Author "Leunissen, P."
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Surface characterization driven CMP optimization for gallium nitride
Karagoz, Ayşe; Siebert, M.; Leunissen, P.; Başım, Gül Bahar (ECS, 2016)Gallium nitride is a hard and chemically inert material demoting high material removal rates in the chemical mechanical planarization (CMP) applications. This paper focuses on the optimization of the process conditions to ...
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